9/12/2012	10:20:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/12/2012	10:20:27 AM	Recipe started at 10:20 AM
9/12/2012	10:20:27 AM	Helium valve closed
9/12/2012	10:20:27 AM	H2 valve closed
9/12/2012	10:20:27 AM	BCl3 valve closed
9/12/2012	10:20:27 AM	PH3 valve closed
9/12/2012	10:20:27 AM	SiCl4 pre valve closed
9/12/2012	10:20:27 AM	SiCl4 post valve closed
9/12/2012	10:20:27 AM	Main Vac valve closed
9/12/2012	10:20:27 AM	Bypass valve closed
9/12/2012	10:20:27 AM	Bubbler valve closed
9/12/2012	10:20:27 AM	Helium MFC set to  0.000000
9/12/2012	10:20:27 AM	H2 MFC set to  0.000000
9/12/2012	10:20:27 AM	BCl3 MFC set to  0.000000
9/12/2012	10:20:27 AM	PH3 MFC set to  0.000000
9/12/2012	10:20:27 AM	SiCl4 MFC set to  0.000000
9/12/2012	10:20:27 AM	Bypass solenoid MFC set to  0.000000
9/12/2012	10:20:27 AM	Tube furnace set to 0
9/12/2012	10:20:30 AM	H2 valve closed
9/12/2012	10:20:30 AM	BCl3 valve closed
9/12/2012	10:20:30 AM	PH3 valve closed
9/12/2012	10:20:30 AM	SiCl4 pre valve closed
9/12/2012	10:20:30 AM	SiCl4 post valve closed
9/12/2012	10:20:30 AM	Main Vac valve closed
9/12/2012	10:20:30 AM	Bypass valve closed
9/12/2012	10:20:30 AM	Bubbler valve closed
9/12/2012	10:20:30 AM	Helium valve opened
9/12/2012	10:20:30 AM	Helium MFC set to  500.000000
9/12/2012	10:20:30 AM	H2 MFC set to  0.000000
9/12/2012	10:20:30 AM	BCl3 MFC set to  0.000000
9/12/2012	10:20:30 AM	PH3 MFC set to  0.000000
9/12/2012	10:20:30 AM	SiCl4 MFC set to  0.000000
9/12/2012	10:20:30 AM	Bypass solenoid MFC set to  0.000000
9/12/2012	10:20:30 AM	Tube furnace set to 0
9/12/2012	10:21:43 AM	Helium valve closed
9/12/2012	10:21:43 AM	H2 valve closed
9/12/2012	10:21:43 AM	BCl3 valve closed
9/12/2012	10:21:43 AM	PH3 valve closed
9/12/2012	10:21:43 AM	SiCl4 pre valve closed
9/12/2012	10:21:43 AM	SiCl4 post valve closed
9/12/2012	10:21:43 AM	Main Vac valve closed
9/12/2012	10:21:43 AM	Bypass valve closed
9/12/2012	10:21:43 AM	Bubbler valve closed
9/12/2012	10:21:43 AM	Helium MFC set to  0.000000
9/12/2012	10:21:43 AM	H2 MFC set to  0.000000
9/12/2012	10:21:43 AM	BCl3 MFC set to  0.000000
9/12/2012	10:21:43 AM	PH3 MFC set to  0.000000
9/12/2012	10:21:43 AM	SiCl4 MFC set to  0.000000
9/12/2012	10:21:43 AM	Bypass solenoid MFC set to  0.000000
9/12/2012	10:21:43 AM	Tube furnace set to 0
9/12/2012	10:21:44 AM	Run finished at 10:21 AM
9/12/2012	10:21:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/12/2012	10:24:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/12/2012	10:25:00 AM	Recipe started at 10:24 AM
9/12/2012	10:25:00 AM	Helium valve closed
9/12/2012	10:25:00 AM	H2 valve closed
9/12/2012	10:25:00 AM	BCl3 valve closed
9/12/2012	10:25:00 AM	PH3 valve closed
9/12/2012	10:25:00 AM	SiCl4 pre valve closed
9/12/2012	10:25:00 AM	SiCl4 post valve closed
9/12/2012	10:25:00 AM	Main Vac valve closed
9/12/2012	10:25:00 AM	Bubbler valve closed
9/12/2012	10:25:00 AM	Bypass valve opened
9/12/2012	10:25:00 AM	Helium MFC set to  0.000000
9/12/2012	10:25:00 AM	H2 MFC set to  0.000000
9/12/2012	10:25:00 AM	BCl3 MFC set to  0.000000
9/12/2012	10:25:00 AM	PH3 MFC set to  0.000000
9/12/2012	10:25:00 AM	SiCl4 MFC set to  0.000000
9/12/2012	10:25:00 AM	Bypass solenoid MFC set to  0.000000
9/12/2012	10:25:00 AM	Tube furnace set to 0
9/12/2012	10:26:14 AM	Helium valve closed
9/12/2012	10:26:14 AM	H2 valve closed
9/12/2012	10:26:14 AM	BCl3 valve closed
9/12/2012	10:26:14 AM	PH3 valve closed
9/12/2012	10:26:14 AM	SiCl4 pre valve closed
9/12/2012	10:26:14 AM	SiCl4 post valve closed
9/12/2012	10:26:14 AM	Main Vac valve closed
9/12/2012	10:26:14 AM	Bubbler valve closed
9/12/2012	10:26:14 AM	Bypass valve opened
9/12/2012	10:26:14 AM	Helium MFC set to  0.000000
9/12/2012	10:26:14 AM	H2 MFC set to  0.000000
9/12/2012	10:26:14 AM	BCl3 MFC set to  0.000000
9/12/2012	10:26:14 AM	PH3 MFC set to  0.000000
9/12/2012	10:26:14 AM	SiCl4 MFC set to  0.000000
9/12/2012	10:26:14 AM	Bypass solenoid MFC set to  0.000000
9/12/2012	10:26:15 AM	Tube furnace set to 0
9/12/2012	10:27:15 AM	Helium valve closed
9/12/2012	10:27:15 AM	H2 valve closed
9/12/2012	10:27:15 AM	BCl3 valve closed
9/12/2012	10:27:15 AM	PH3 valve closed
9/12/2012	10:27:15 AM	SiCl4 pre valve closed
9/12/2012	10:27:15 AM	SiCl4 post valve closed
9/12/2012	10:27:15 AM	Bypass valve closed
9/12/2012	10:27:15 AM	Bubbler valve closed
9/12/2012	10:27:15 AM	Main Vac valve opened
9/12/2012	10:27:15 AM	Helium MFC set to  0.000000
9/12/2012	10:27:15 AM	H2 MFC set to  0.000000
9/12/2012	10:27:15 AM	BCl3 MFC set to  0.000000
9/12/2012	10:27:15 AM	PH3 MFC set to  0.000000
9/12/2012	10:27:15 AM	SiCl4 MFC set to  0.000000
9/12/2012	10:27:15 AM	Bypass solenoid MFC set to  0.000000
9/12/2012	10:27:15 AM	Tube furnace set to 0
9/12/2012	10:27:16 AM	Run finished at 10:27 AM
9/12/2012	10:27:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/12/2012	12:13:41 PM	Main Vac valve closed
9/12/2012	12:13:47 PM	Main Vac valve opened
9/12/2012	12:14:02 PM	Main Vac valve closed
9/12/2012	12:14:14 PM	Main Vac valve opened
9/12/2012	12:19:33 PM	Recipe started at 12:19 PM
9/12/2012	12:19:33 PM	Helium valve closed
9/12/2012	12:19:33 PM	H2 valve closed
9/12/2012	12:19:33 PM	BCl3 valve closed
9/12/2012	12:19:33 PM	PH3 valve closed
9/12/2012	12:19:33 PM	SiCl4 pre valve closed
9/12/2012	12:19:33 PM	SiCl4 post valve closed
9/12/2012	12:19:33 PM	Bypass valve closed
9/12/2012	12:19:34 PM	Bubbler valve closed
9/12/2012	12:19:34 PM	Main Vac valve opened
9/12/2012	12:19:34 PM	Helium MFC set to  0.000000
9/12/2012	12:19:34 PM	H2 MFC set to  0.000000
9/12/2012	12:19:34 PM	BCl3 MFC set to  0.000000
9/12/2012	12:19:34 PM	PH3 MFC set to  0.000000
9/12/2012	12:19:34 PM	SiCl4 MFC set to  0.000000
9/12/2012	12:19:34 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	12:19:34 PM	Tube furnace set to 0
9/12/2012	12:19:37 PM	Helium valve closed
9/12/2012	12:19:37 PM	H2 valve closed
9/12/2012	12:19:37 PM	BCl3 valve closed
9/12/2012	12:19:37 PM	PH3 valve closed
9/12/2012	12:19:37 PM	SiCl4 pre valve closed
9/12/2012	12:19:37 PM	SiCl4 post valve closed
9/12/2012	12:19:37 PM	Main Vac valve closed
9/12/2012	12:19:37 PM	Bypass valve closed
9/12/2012	12:19:37 PM	Bubbler valve closed
9/12/2012	12:19:37 PM	Helium MFC set to  0.000000
9/12/2012	12:19:37 PM	H2 MFC set to  0.000000
9/12/2012	12:19:37 PM	BCl3 MFC set to  0.000000
9/12/2012	12:19:37 PM	PH3 MFC set to  0.000000
9/12/2012	12:19:37 PM	SiCl4 MFC set to  0.000000
9/12/2012	12:19:37 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	12:19:37 PM	Tube furnace set to 0
9/12/2012	12:19:40 PM	Helium valve closed
9/12/2012	12:19:40 PM	BCl3 valve closed
9/12/2012	12:19:40 PM	PH3 valve closed
9/12/2012	12:19:40 PM	SiCl4 pre valve closed
9/12/2012	12:19:40 PM	SiCl4 post valve closed
9/12/2012	12:19:40 PM	Main Vac valve closed
9/12/2012	12:19:40 PM	Bypass valve closed
9/12/2012	12:19:40 PM	Bubbler valve closed
9/12/2012	12:19:40 PM	H2 valve opened
9/12/2012	12:19:40 PM	Helium MFC set to  0.000000
9/12/2012	12:19:40 PM	H2 MFC set to  500.000000
9/12/2012	12:19:40 PM	BCl3 MFC set to  0.000000
9/12/2012	12:19:40 PM	PH3 MFC set to  0.000000
9/12/2012	12:19:40 PM	SiCl4 MFC set to  0.000000
9/12/2012	12:19:40 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	12:19:40 PM	Tube furnace set to 0
9/12/2012	12:20:56 PM	Helium valve closed
9/12/2012	12:20:56 PM	BCl3 valve closed
9/12/2012	12:20:56 PM	PH3 valve closed
9/12/2012	12:20:56 PM	SiCl4 pre valve closed
9/12/2012	12:20:56 PM	SiCl4 post valve closed
9/12/2012	12:20:56 PM	Main Vac valve closed
9/12/2012	12:20:56 PM	Bypass valve closed
9/12/2012	12:20:56 PM	H2 valve opened
9/12/2012	12:20:56 PM	Bubbler valve opened
9/12/2012	12:20:56 PM	Helium MFC set to  0.000000
9/12/2012	12:20:56 PM	H2 MFC set to  500.000000
9/12/2012	12:20:56 PM	BCl3 MFC set to  0.000000
9/12/2012	12:20:56 PM	PH3 MFC set to  0.000000
9/12/2012	12:20:56 PM	SiCl4 MFC set to  0.000000
9/12/2012	12:20:56 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	12:20:56 PM	Tube furnace set to 0
9/12/2012	12:20:57 PM	Helium valve closed
9/12/2012	12:20:57 PM	BCl3 valve closed
9/12/2012	12:20:57 PM	PH3 valve closed
9/12/2012	12:20:57 PM	SiCl4 pre valve closed
9/12/2012	12:20:57 PM	SiCl4 post valve closed
9/12/2012	12:20:57 PM	Main Vac valve closed
9/12/2012	12:20:57 PM	Bypass valve closed
9/12/2012	12:20:57 PM	H2 valve opened
9/12/2012	12:20:57 PM	Bubbler valve opened
9/12/2012	12:20:57 PM	Helium MFC set to  0.000000
9/12/2012	12:20:57 PM	H2 MFC set to  500.000000
9/12/2012	12:20:57 PM	BCl3 MFC set to  0.000000
9/12/2012	12:20:57 PM	PH3 MFC set to  0.000000
9/12/2012	12:20:57 PM	SiCl4 MFC set to  0.000000
9/12/2012	12:20:57 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	12:20:57 PM	Tube furnace set to 1000
9/12/2012	12:45:57 PM	Helium valve closed
9/12/2012	12:45:57 PM	PH3 valve closed
9/12/2012	12:45:57 PM	Main Vac valve closed
9/12/2012	12:45:57 PM	Bypass valve closed
9/12/2012	12:45:57 PM	H2 valve opened
9/12/2012	12:45:57 PM	BCl3 valve opened
9/12/2012	12:45:57 PM	SiCl4 pre valve opened
9/12/2012	12:45:57 PM	SiCl4 post valve opened
9/12/2012	12:45:57 PM	Bubbler valve opened
9/12/2012	12:45:57 PM	Helium MFC set to  0.000000
9/12/2012	12:45:57 PM	H2 MFC set to  430.000000
9/12/2012	12:45:57 PM	BCl3 MFC set to  20.000000
9/12/2012	12:45:57 PM	PH3 MFC set to  0.000000
9/12/2012	12:45:57 PM	SiCl4 MFC set to  50.000000
9/12/2012	12:45:57 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	12:45:58 PM	Tube furnace set to 1000
9/12/2012	12:52:58 PM	Helium valve closed
9/12/2012	12:52:58 PM	PH3 valve closed
9/12/2012	12:52:58 PM	Main Vac valve closed
9/12/2012	12:52:58 PM	Bypass valve closed
9/12/2012	12:52:58 PM	H2 valve opened
9/12/2012	12:52:58 PM	BCl3 valve opened
9/12/2012	12:52:58 PM	SiCl4 pre valve opened
9/12/2012	12:52:58 PM	SiCl4 post valve opened
9/12/2012	12:52:58 PM	Bubbler valve opened
9/12/2012	12:52:58 PM	Helium MFC set to  0.000000
9/12/2012	12:52:58 PM	H2 MFC set to  450.000000
9/12/2012	12:52:58 PM	BCl3 MFC set to  1.000000
9/12/2012	12:52:58 PM	PH3 MFC set to  0.000000
9/12/2012	12:52:58 PM	SiCl4 MFC set to  50.000000
9/12/2012	12:52:58 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	12:52:58 PM	Tube furnace set to 1000
9/12/2012	12:59:58 PM	Helium valve closed
9/12/2012	12:59:58 PM	BCl3 valve closed
9/12/2012	12:59:58 PM	Main Vac valve closed
9/12/2012	12:59:58 PM	Bypass valve closed
9/12/2012	12:59:58 PM	H2 valve opened
9/12/2012	12:59:58 PM	PH3 valve opened
9/12/2012	12:59:58 PM	SiCl4 pre valve opened
9/12/2012	12:59:58 PM	SiCl4 post valve opened
9/12/2012	12:59:58 PM	Bubbler valve opened
9/12/2012	12:59:58 PM	Helium MFC set to  0.000000
9/12/2012	12:59:58 PM	H2 MFC set to  445.000000
9/12/2012	12:59:58 PM	BCl3 MFC set to  0.000000
9/12/2012	12:59:58 PM	PH3 MFC set to  5.000000
9/12/2012	12:59:58 PM	SiCl4 MFC set to  50.000000
9/12/2012	12:59:58 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	12:59:58 PM	Tube furnace set to 1000
9/12/2012	1:06:58 PM	Helium valve closed
9/12/2012	1:06:58 PM	BCl3 valve closed
9/12/2012	1:06:58 PM	Main Vac valve closed
9/12/2012	1:06:58 PM	Bypass valve closed
9/12/2012	1:06:58 PM	H2 valve opened
9/12/2012	1:06:58 PM	PH3 valve opened
9/12/2012	1:06:58 PM	SiCl4 pre valve opened
9/12/2012	1:06:58 PM	SiCl4 post valve opened
9/12/2012	1:06:58 PM	Bubbler valve opened
9/12/2012	1:06:58 PM	Helium MFC set to  0.000000
9/12/2012	1:06:58 PM	H2 MFC set to  430.000000
9/12/2012	1:06:58 PM	BCl3 MFC set to  0.000000
9/12/2012	1:06:58 PM	PH3 MFC set to  20.000000
9/12/2012	1:06:58 PM	SiCl4 MFC set to  50.000000
9/12/2012	1:06:58 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	1:06:58 PM	Tube furnace set to 1000
9/12/2012	1:13:58 PM	Helium valve closed
9/12/2012	1:13:58 PM	BCl3 valve closed
9/12/2012	1:13:58 PM	PH3 valve closed
9/12/2012	1:13:58 PM	SiCl4 pre valve closed
9/12/2012	1:13:58 PM	SiCl4 post valve closed
9/12/2012	1:13:58 PM	Main Vac valve closed
9/12/2012	1:13:58 PM	Bypass valve closed
9/12/2012	1:13:58 PM	H2 valve opened
9/12/2012	1:13:58 PM	Bubbler valve opened
9/12/2012	1:13:58 PM	Helium MFC set to  0.000000
9/12/2012	1:13:58 PM	H2 MFC set to  500.000000
9/12/2012	1:13:58 PM	BCl3 MFC set to  0.000000
9/12/2012	1:13:58 PM	PH3 MFC set to  0.000000
9/12/2012	1:13:58 PM	SiCl4 MFC set to  0.000000
9/12/2012	1:13:58 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	1:13:58 PM	Tube furnace set to 750
9/12/2012	1:28:58 PM	H2 valve closed
9/12/2012	1:28:58 PM	BCl3 valve closed
9/12/2012	1:28:58 PM	PH3 valve closed
9/12/2012	1:28:58 PM	SiCl4 pre valve closed
9/12/2012	1:28:58 PM	SiCl4 post valve closed
9/12/2012	1:28:58 PM	Main Vac valve closed
9/12/2012	1:28:58 PM	Bypass valve closed
9/12/2012	1:28:58 PM	Helium valve opened
9/12/2012	1:28:58 PM	Bubbler valve opened
9/12/2012	1:28:58 PM	Helium MFC set to  500.000000
9/12/2012	1:28:58 PM	H2 MFC set to  0.000000
9/12/2012	1:28:58 PM	BCl3 MFC set to  0.000000
9/12/2012	1:28:58 PM	PH3 MFC set to  0.000000
9/12/2012	1:28:58 PM	SiCl4 MFC set to  0.000000
9/12/2012	1:28:58 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	1:28:59 PM	Tube furnace set to 0
9/12/2012	1:48:59 PM	Helium valve closed
9/12/2012	1:48:59 PM	H2 valve closed
9/12/2012	1:48:59 PM	BCl3 valve closed
9/12/2012	1:48:59 PM	PH3 valve closed
9/12/2012	1:48:59 PM	SiCl4 pre valve closed
9/12/2012	1:48:59 PM	SiCl4 post valve closed
9/12/2012	1:48:59 PM	Main Vac valve closed
9/12/2012	1:48:59 PM	Bypass valve closed
9/12/2012	1:48:59 PM	Bubbler valve closed
9/12/2012	1:48:59 PM	Helium MFC set to  0.000000
9/12/2012	1:48:59 PM	H2 MFC set to  0.000000
9/12/2012	1:48:59 PM	BCl3 MFC set to  0.000000
9/12/2012	1:48:59 PM	PH3 MFC set to  0.000000
9/12/2012	1:48:59 PM	SiCl4 MFC set to  0.000000
9/12/2012	1:48:59 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	1:48:59 PM	Tube furnace set to 0
9/12/2012	2:01:50 PM	Helium valve closed
9/12/2012	2:01:50 PM	H2 valve closed
9/12/2012	2:01:50 PM	BCl3 valve closed
9/12/2012	2:01:50 PM	PH3 valve closed
9/12/2012	2:01:50 PM	SiCl4 pre valve closed
9/12/2012	2:01:50 PM	SiCl4 post valve closed
9/12/2012	2:01:50 PM	Main Vac valve closed
9/12/2012	2:01:50 PM	Bubbler valve closed
9/12/2012	2:01:50 PM	Bypass valve opened
9/12/2012	2:01:50 PM	Helium MFC set to  0.000000
9/12/2012	2:01:50 PM	H2 MFC set to  0.000000
9/12/2012	2:01:50 PM	BCl3 MFC set to  0.000000
9/12/2012	2:01:50 PM	PH3 MFC set to  0.000000
9/12/2012	2:01:50 PM	SiCl4 MFC set to  0.000000
9/12/2012	2:01:50 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	2:01:50 PM	Tube furnace set to 0
9/12/2012	2:02:48 PM	Helium valve closed
9/12/2012	2:02:48 PM	H2 valve closed
9/12/2012	2:02:48 PM	BCl3 valve closed
9/12/2012	2:02:48 PM	PH3 valve closed
9/12/2012	2:02:48 PM	SiCl4 pre valve closed
9/12/2012	2:02:48 PM	SiCl4 post valve closed
9/12/2012	2:02:48 PM	Main Vac valve closed
9/12/2012	2:02:48 PM	Bubbler valve closed
9/12/2012	2:02:48 PM	Bypass valve opened
9/12/2012	2:02:48 PM	Helium MFC set to  0.000000
9/12/2012	2:02:48 PM	H2 MFC set to  0.000000
9/12/2012	2:02:48 PM	BCl3 MFC set to  0.000000
9/12/2012	2:02:48 PM	PH3 MFC set to  0.000000
9/12/2012	2:02:48 PM	SiCl4 MFC set to  0.000000
9/12/2012	2:02:48 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	2:02:49 PM	Tube furnace set to 0
9/12/2012	2:03:49 PM	Helium valve closed
9/12/2012	2:03:49 PM	H2 valve closed
9/12/2012	2:03:49 PM	BCl3 valve closed
9/12/2012	2:03:49 PM	PH3 valve closed
9/12/2012	2:03:49 PM	SiCl4 pre valve closed
9/12/2012	2:03:49 PM	SiCl4 post valve closed
9/12/2012	2:03:49 PM	Bypass valve closed
9/12/2012	2:03:49 PM	Bubbler valve closed
9/12/2012	2:03:49 PM	Main Vac valve opened
9/12/2012	2:03:49 PM	Helium MFC set to  0.000000
9/12/2012	2:03:49 PM	H2 MFC set to  0.000000
9/12/2012	2:03:49 PM	BCl3 MFC set to  0.000000
9/12/2012	2:03:49 PM	PH3 MFC set to  0.000000
9/12/2012	2:03:49 PM	SiCl4 MFC set to  0.000000
9/12/2012	2:03:49 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	2:03:49 PM	Tube furnace set to 0
9/12/2012	2:09:37 PM	Run finished at 2:09 PM
9/12/2012	2:16:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/12/2012	2:16:32 PM	Recipe started at 2:16 PM
9/12/2012	2:16:32 PM	Helium valve closed
9/12/2012	2:16:32 PM	H2 valve closed
9/12/2012	2:16:32 PM	BCl3 valve closed
9/12/2012	2:16:32 PM	PH3 valve closed
9/12/2012	2:16:32 PM	SiCl4 pre valve closed
9/12/2012	2:16:32 PM	SiCl4 post valve closed
9/12/2012	2:16:32 PM	Main Vac valve closed
9/12/2012	2:16:32 PM	Bypass valve closed
9/12/2012	2:16:32 PM	Bubbler valve closed
9/12/2012	2:16:32 PM	Helium MFC set to  0.000000
9/12/2012	2:16:32 PM	H2 MFC set to  0.000000
9/12/2012	2:16:32 PM	BCl3 MFC set to  0.000000
9/12/2012	2:16:32 PM	PH3 MFC set to  0.000000
9/12/2012	2:16:32 PM	SiCl4 MFC set to  0.000000
9/12/2012	2:16:32 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	2:16:33 PM	Tube furnace set to 0
9/12/2012	2:16:36 PM	H2 valve closed
9/12/2012	2:16:36 PM	BCl3 valve closed
9/12/2012	2:16:36 PM	PH3 valve closed
9/12/2012	2:16:36 PM	SiCl4 pre valve closed
9/12/2012	2:16:36 PM	SiCl4 post valve closed
9/12/2012	2:16:36 PM	Main Vac valve closed
9/12/2012	2:16:36 PM	Bypass valve closed
9/12/2012	2:16:36 PM	Bubbler valve closed
9/12/2012	2:16:36 PM	Helium valve opened
9/12/2012	2:16:36 PM	Helium MFC set to  500.000000
9/12/2012	2:16:36 PM	H2 MFC set to  0.000000
9/12/2012	2:16:36 PM	BCl3 MFC set to  0.000000
9/12/2012	2:16:36 PM	PH3 MFC set to  0.000000
9/12/2012	2:16:36 PM	SiCl4 MFC set to  0.000000
9/12/2012	2:16:36 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	2:16:36 PM	Tube furnace set to 0
9/12/2012	2:17:46 PM	Helium valve closed
9/12/2012	2:17:46 PM	H2 valve closed
9/12/2012	2:17:46 PM	BCl3 valve closed
9/12/2012	2:17:46 PM	PH3 valve closed
9/12/2012	2:17:46 PM	SiCl4 pre valve closed
9/12/2012	2:17:46 PM	SiCl4 post valve closed
9/12/2012	2:17:46 PM	Main Vac valve closed
9/12/2012	2:17:46 PM	Bypass valve closed
9/12/2012	2:17:46 PM	Bubbler valve closed
9/12/2012	2:17:46 PM	Helium MFC set to  0.000000
9/12/2012	2:17:46 PM	H2 MFC set to  0.000000
9/12/2012	2:17:46 PM	BCl3 MFC set to  0.000000
9/12/2012	2:17:46 PM	PH3 MFC set to  0.000000
9/12/2012	2:17:46 PM	SiCl4 MFC set to  0.000000
9/12/2012	2:17:46 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	2:17:46 PM	Tube furnace set to 0
9/12/2012	2:17:47 PM	Run finished at 2:17 PM
9/12/2012	2:17:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/12/2012	2:25:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/12/2012	2:25:32 PM	Recipe started at 2:25 PM
9/12/2012	2:25:32 PM	Helium valve closed
9/12/2012	2:25:32 PM	H2 valve closed
9/12/2012	2:25:32 PM	BCl3 valve closed
9/12/2012	2:25:32 PM	PH3 valve closed
9/12/2012	2:25:32 PM	SiCl4 pre valve closed
9/12/2012	2:25:32 PM	SiCl4 post valve closed
9/12/2012	2:25:32 PM	Main Vac valve closed
9/12/2012	2:25:32 PM	Bubbler valve closed
9/12/2012	2:25:32 PM	Bypass valve opened
9/12/2012	2:25:32 PM	Helium MFC set to  0.000000
9/12/2012	2:25:32 PM	H2 MFC set to  0.000000
9/12/2012	2:25:32 PM	BCl3 MFC set to  0.000000
9/12/2012	2:25:32 PM	PH3 MFC set to  0.000000
9/12/2012	2:25:32 PM	SiCl4 MFC set to  0.000000
9/12/2012	2:25:32 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	2:25:32 PM	Tube furnace set to 0
9/12/2012	2:26:56 PM	Helium valve closed
9/12/2012	2:26:56 PM	H2 valve closed
9/12/2012	2:26:56 PM	BCl3 valve closed
9/12/2012	2:26:56 PM	PH3 valve closed
9/12/2012	2:26:56 PM	SiCl4 pre valve closed
9/12/2012	2:26:56 PM	SiCl4 post valve closed
9/12/2012	2:26:56 PM	Main Vac valve closed
9/12/2012	2:26:56 PM	Bubbler valve closed
9/12/2012	2:26:56 PM	Bypass valve opened
9/12/2012	2:26:56 PM	Helium MFC set to  0.000000
9/12/2012	2:26:56 PM	H2 MFC set to  0.000000
9/12/2012	2:26:56 PM	BCl3 MFC set to  0.000000
9/12/2012	2:26:56 PM	PH3 MFC set to  0.000000
9/12/2012	2:26:56 PM	SiCl4 MFC set to  0.000000
9/12/2012	2:26:56 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	2:26:56 PM	Tube furnace set to 0
9/12/2012	2:27:56 PM	Helium valve closed
9/12/2012	2:27:56 PM	H2 valve closed
9/12/2012	2:27:56 PM	BCl3 valve closed
9/12/2012	2:27:56 PM	PH3 valve closed
9/12/2012	2:27:56 PM	SiCl4 pre valve closed
9/12/2012	2:27:56 PM	SiCl4 post valve closed
9/12/2012	2:27:56 PM	Bypass valve closed
9/12/2012	2:27:56 PM	Bubbler valve closed
9/12/2012	2:27:56 PM	Main Vac valve opened
9/12/2012	2:27:56 PM	Helium MFC set to  0.000000
9/12/2012	2:27:56 PM	H2 MFC set to  0.000000
9/12/2012	2:27:56 PM	BCl3 MFC set to  0.000000
9/12/2012	2:27:56 PM	PH3 MFC set to  0.000000
9/12/2012	2:27:56 PM	SiCl4 MFC set to  0.000000
9/12/2012	2:27:56 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	2:27:56 PM	Tube furnace set to 0
9/12/2012	2:27:57 PM	Run finished at 2:27 PM
9/12/2012	2:27:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/12/2012	4:04:36 PM	Main Vac valve closed
9/12/2012	4:04:49 PM	Main Vac valve opened
9/12/2012	4:05:07 PM	Recipe started at 4:05 PM
9/12/2012	4:05:07 PM	Helium valve closed
9/12/2012	4:05:07 PM	H2 valve closed
9/12/2012	4:05:07 PM	BCl3 valve closed
9/12/2012	4:05:07 PM	PH3 valve closed
9/12/2012	4:05:07 PM	SiCl4 pre valve closed
9/12/2012	4:05:07 PM	SiCl4 post valve closed
9/12/2012	4:05:07 PM	Bypass valve closed
9/12/2012	4:05:07 PM	Bubbler valve closed
9/12/2012	4:05:07 PM	Main Vac valve opened
9/12/2012	4:05:07 PM	Helium MFC set to  0.000000
9/12/2012	4:05:07 PM	H2 MFC set to  0.000000
9/12/2012	4:05:07 PM	BCl3 MFC set to  0.000000
9/12/2012	4:05:07 PM	PH3 MFC set to  0.000000
9/12/2012	4:05:07 PM	SiCl4 MFC set to  0.000000
9/12/2012	4:05:07 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	4:05:07 PM	Tube furnace set to 0
9/12/2012	4:05:10 PM	Helium valve closed
9/12/2012	4:05:10 PM	H2 valve closed
9/12/2012	4:05:10 PM	BCl3 valve closed
9/12/2012	4:05:10 PM	PH3 valve closed
9/12/2012	4:05:10 PM	SiCl4 pre valve closed
9/12/2012	4:05:10 PM	SiCl4 post valve closed
9/12/2012	4:05:10 PM	Main Vac valve closed
9/12/2012	4:05:10 PM	Bypass valve closed
9/12/2012	4:05:10 PM	Bubbler valve closed
9/12/2012	4:05:10 PM	Helium MFC set to  0.000000
9/12/2012	4:05:10 PM	H2 MFC set to  0.000000
9/12/2012	4:05:10 PM	BCl3 MFC set to  0.000000
9/12/2012	4:05:10 PM	PH3 MFC set to  0.000000
9/12/2012	4:05:10 PM	SiCl4 MFC set to  0.000000
9/12/2012	4:05:10 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	4:05:11 PM	Tube furnace set to 0
9/12/2012	4:05:14 PM	Helium valve closed
9/12/2012	4:05:14 PM	BCl3 valve closed
9/12/2012	4:05:14 PM	PH3 valve closed
9/12/2012	4:05:14 PM	SiCl4 pre valve closed
9/12/2012	4:05:14 PM	SiCl4 post valve closed
9/12/2012	4:05:14 PM	Main Vac valve closed
9/12/2012	4:05:14 PM	Bypass valve closed
9/12/2012	4:05:14 PM	Bubbler valve closed
9/12/2012	4:05:14 PM	H2 valve opened
9/12/2012	4:05:14 PM	Helium MFC set to  0.000000
9/12/2012	4:05:14 PM	H2 MFC set to  500.000000
9/12/2012	4:05:14 PM	BCl3 MFC set to  0.000000
9/12/2012	4:05:14 PM	PH3 MFC set to  0.000000
9/12/2012	4:05:14 PM	SiCl4 MFC set to  0.000000
9/12/2012	4:05:14 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	4:05:14 PM	Tube furnace set to 0
9/12/2012	4:06:28 PM	Helium valve closed
9/12/2012	4:06:28 PM	BCl3 valve closed
9/12/2012	4:06:28 PM	PH3 valve closed
9/12/2012	4:06:28 PM	SiCl4 pre valve closed
9/12/2012	4:06:28 PM	SiCl4 post valve closed
9/12/2012	4:06:28 PM	Main Vac valve closed
9/12/2012	4:06:28 PM	Bypass valve closed
9/12/2012	4:06:28 PM	H2 valve opened
9/12/2012	4:06:28 PM	Bubbler valve opened
9/12/2012	4:06:28 PM	Helium MFC set to  0.000000
9/12/2012	4:06:28 PM	H2 MFC set to  500.000000
9/12/2012	4:06:28 PM	BCl3 MFC set to  0.000000
9/12/2012	4:06:28 PM	PH3 MFC set to  0.000000
9/12/2012	4:06:28 PM	SiCl4 MFC set to  0.000000
9/12/2012	4:06:28 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	4:06:28 PM	Tube furnace set to 0
9/12/2012	4:06:29 PM	Helium valve closed
9/12/2012	4:06:29 PM	BCl3 valve closed
9/12/2012	4:06:29 PM	PH3 valve closed
9/12/2012	4:06:29 PM	SiCl4 pre valve closed
9/12/2012	4:06:29 PM	SiCl4 post valve closed
9/12/2012	4:06:29 PM	Main Vac valve closed
9/12/2012	4:06:29 PM	Bypass valve closed
9/12/2012	4:06:29 PM	H2 valve opened
9/12/2012	4:06:29 PM	Bubbler valve opened
9/12/2012	4:06:29 PM	Helium MFC set to  0.000000
9/12/2012	4:06:29 PM	H2 MFC set to  500.000000
9/12/2012	4:06:29 PM	BCl3 MFC set to  0.000000
9/12/2012	4:06:29 PM	PH3 MFC set to  0.000000
9/12/2012	4:06:29 PM	SiCl4 MFC set to  0.000000
9/12/2012	4:06:29 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	4:06:29 PM	Tube furnace set to 1000
9/12/2012	4:31:29 PM	Helium valve closed
9/12/2012	4:31:29 PM	PH3 valve closed
9/12/2012	4:31:29 PM	Main Vac valve closed
9/12/2012	4:31:29 PM	Bypass valve closed
9/12/2012	4:31:29 PM	H2 valve opened
9/12/2012	4:31:29 PM	BCl3 valve opened
9/12/2012	4:31:29 PM	SiCl4 pre valve opened
9/12/2012	4:31:29 PM	SiCl4 post valve opened
9/12/2012	4:31:29 PM	Bubbler valve opened
9/12/2012	4:31:29 PM	Helium MFC set to  0.000000
9/12/2012	4:31:29 PM	H2 MFC set to  430.000000
9/12/2012	4:31:29 PM	BCl3 MFC set to  20.000000
9/12/2012	4:31:29 PM	PH3 MFC set to  0.000000
9/12/2012	4:31:29 PM	SiCl4 MFC set to  50.000000
9/12/2012	4:31:29 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	4:31:29 PM	Tube furnace set to 1000
9/12/2012	4:38:29 PM	Helium valve closed
9/12/2012	4:38:29 PM	PH3 valve closed
9/12/2012	4:38:29 PM	Main Vac valve closed
9/12/2012	4:38:29 PM	Bypass valve closed
9/12/2012	4:38:29 PM	H2 valve opened
9/12/2012	4:38:29 PM	BCl3 valve opened
9/12/2012	4:38:29 PM	SiCl4 pre valve opened
9/12/2012	4:38:29 PM	SiCl4 post valve opened
9/12/2012	4:38:29 PM	Bubbler valve opened
9/12/2012	4:38:29 PM	Helium MFC set to  0.000000
9/12/2012	4:38:29 PM	H2 MFC set to  450.000000
9/12/2012	4:38:29 PM	BCl3 MFC set to  1.000000
9/12/2012	4:38:29 PM	PH3 MFC set to  0.000000
9/12/2012	4:38:29 PM	SiCl4 MFC set to  50.000000
9/12/2012	4:38:29 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	4:38:30 PM	Tube furnace set to 1000
9/12/2012	4:45:30 PM	Helium valve closed
9/12/2012	4:45:30 PM	BCl3 valve closed
9/12/2012	4:45:30 PM	Main Vac valve closed
9/12/2012	4:45:30 PM	Bypass valve closed
9/12/2012	4:45:30 PM	H2 valve opened
9/12/2012	4:45:30 PM	PH3 valve opened
9/12/2012	4:45:30 PM	SiCl4 pre valve opened
9/12/2012	4:45:30 PM	SiCl4 post valve opened
9/12/2012	4:45:30 PM	Bubbler valve opened
9/12/2012	4:45:30 PM	Helium MFC set to  0.000000
9/12/2012	4:45:30 PM	H2 MFC set to  450.000000
9/12/2012	4:45:30 PM	BCl3 MFC set to  0.000000
9/12/2012	4:45:30 PM	PH3 MFC set to  1.500000
9/12/2012	4:45:30 PM	SiCl4 MFC set to  50.000000
9/12/2012	4:45:30 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	4:45:30 PM	Tube furnace set to 1000
9/12/2012	4:52:30 PM	Helium valve closed
9/12/2012	4:52:30 PM	BCl3 valve closed
9/12/2012	4:52:30 PM	Main Vac valve closed
9/12/2012	4:52:30 PM	Bypass valve closed
9/12/2012	4:52:30 PM	H2 valve opened
9/12/2012	4:52:30 PM	PH3 valve opened
9/12/2012	4:52:30 PM	SiCl4 pre valve opened
9/12/2012	4:52:30 PM	SiCl4 post valve opened
9/12/2012	4:52:30 PM	Bubbler valve opened
9/12/2012	4:52:30 PM	Helium MFC set to  0.000000
9/12/2012	4:52:30 PM	H2 MFC set to  430.000000
9/12/2012	4:52:30 PM	BCl3 MFC set to  0.000000
9/12/2012	4:52:30 PM	PH3 MFC set to  20.000000
9/12/2012	4:52:30 PM	SiCl4 MFC set to  50.000000
9/12/2012	4:52:30 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	4:52:30 PM	Tube furnace set to 1000
9/12/2012	4:59:30 PM	Helium valve closed
9/12/2012	4:59:30 PM	BCl3 valve closed
9/12/2012	4:59:30 PM	PH3 valve closed
9/12/2012	4:59:30 PM	SiCl4 pre valve closed
9/12/2012	4:59:30 PM	SiCl4 post valve closed
9/12/2012	4:59:30 PM	Main Vac valve closed
9/12/2012	4:59:30 PM	Bypass valve closed
9/12/2012	4:59:30 PM	H2 valve opened
9/12/2012	4:59:30 PM	Bubbler valve opened
9/12/2012	4:59:30 PM	Helium MFC set to  0.000000
9/12/2012	4:59:30 PM	H2 MFC set to  500.000000
9/12/2012	4:59:30 PM	BCl3 MFC set to  0.000000
9/12/2012	4:59:30 PM	PH3 MFC set to  0.000000
9/12/2012	4:59:30 PM	SiCl4 MFC set to  0.000000
9/12/2012	4:59:30 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	4:59:30 PM	Tube furnace set to 750
9/12/2012	5:14:30 PM	H2 valve closed
9/12/2012	5:14:30 PM	BCl3 valve closed
9/12/2012	5:14:30 PM	PH3 valve closed
9/12/2012	5:14:30 PM	SiCl4 pre valve closed
9/12/2012	5:14:30 PM	SiCl4 post valve closed
9/12/2012	5:14:30 PM	Main Vac valve closed
9/12/2012	5:14:30 PM	Bypass valve closed
9/12/2012	5:14:30 PM	Helium valve opened
9/12/2012	5:14:30 PM	Bubbler valve opened
9/12/2012	5:14:30 PM	Helium MFC set to  500.000000
9/12/2012	5:14:30 PM	H2 MFC set to  0.000000
9/12/2012	5:14:30 PM	BCl3 MFC set to  0.000000
9/12/2012	5:14:30 PM	PH3 MFC set to  0.000000
9/12/2012	5:14:30 PM	SiCl4 MFC set to  0.000000
9/12/2012	5:14:30 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	5:14:30 PM	Tube furnace set to 0
9/12/2012	5:34:30 PM	Helium valve closed
9/12/2012	5:34:30 PM	H2 valve closed
9/12/2012	5:34:30 PM	BCl3 valve closed
9/12/2012	5:34:30 PM	PH3 valve closed
9/12/2012	5:34:30 PM	SiCl4 pre valve closed
9/12/2012	5:34:30 PM	SiCl4 post valve closed
9/12/2012	5:34:30 PM	Main Vac valve closed
9/12/2012	5:34:30 PM	Bypass valve closed
9/12/2012	5:34:30 PM	Bubbler valve closed
9/12/2012	5:34:30 PM	Helium MFC set to  0.000000
9/12/2012	5:34:31 PM	H2 MFC set to  0.000000
9/12/2012	5:34:31 PM	BCl3 MFC set to  0.000000
9/12/2012	5:34:31 PM	PH3 MFC set to  0.000000
9/12/2012	5:34:31 PM	SiCl4 MFC set to  0.000000
9/12/2012	5:34:31 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	5:34:31 PM	Tube furnace set to 0
9/12/2012	5:54:31 PM	Helium valve closed
9/12/2012	5:54:31 PM	H2 valve closed
9/12/2012	5:54:31 PM	BCl3 valve closed
9/12/2012	5:54:31 PM	PH3 valve closed
9/12/2012	5:54:31 PM	SiCl4 pre valve closed
9/12/2012	5:54:31 PM	SiCl4 post valve closed
9/12/2012	5:54:31 PM	Main Vac valve closed
9/12/2012	5:54:31 PM	Bubbler valve closed
9/12/2012	5:54:31 PM	Bypass valve opened
9/12/2012	5:54:31 PM	Helium MFC set to  0.000000
9/12/2012	5:54:31 PM	H2 MFC set to  0.000000
9/12/2012	5:54:31 PM	BCl3 MFC set to  0.000000
9/12/2012	5:54:31 PM	PH3 MFC set to  0.000000
9/12/2012	5:54:31 PM	SiCl4 MFC set to  0.000000
9/12/2012	5:54:31 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	5:54:31 PM	Tube furnace set to 0
9/12/2012	5:55:28 PM	Helium valve closed
9/12/2012	5:55:28 PM	H2 valve closed
9/12/2012	5:55:28 PM	BCl3 valve closed
9/12/2012	5:55:28 PM	PH3 valve closed
9/12/2012	5:55:28 PM	SiCl4 pre valve closed
9/12/2012	5:55:28 PM	SiCl4 post valve closed
9/12/2012	5:55:28 PM	Main Vac valve closed
9/12/2012	5:55:28 PM	Bubbler valve closed
9/12/2012	5:55:28 PM	Bypass valve opened
9/12/2012	5:55:28 PM	Helium MFC set to  0.000000
9/12/2012	5:55:28 PM	H2 MFC set to  0.000000
9/12/2012	5:55:28 PM	BCl3 MFC set to  0.000000
9/12/2012	5:55:28 PM	PH3 MFC set to  0.000000
9/12/2012	5:55:28 PM	SiCl4 MFC set to  0.000000
9/12/2012	5:55:28 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	5:55:28 PM	Tube furnace set to 0
9/12/2012	5:56:28 PM	Helium valve closed
9/12/2012	5:56:28 PM	H2 valve closed
9/12/2012	5:56:28 PM	BCl3 valve closed
9/12/2012	5:56:28 PM	PH3 valve closed
9/12/2012	5:56:28 PM	SiCl4 pre valve closed
9/12/2012	5:56:28 PM	SiCl4 post valve closed
9/12/2012	5:56:28 PM	Bypass valve closed
9/12/2012	5:56:28 PM	Bubbler valve closed
9/12/2012	5:56:28 PM	Main Vac valve opened
9/12/2012	5:56:28 PM	Helium MFC set to  0.000000
9/12/2012	5:56:28 PM	H2 MFC set to  0.000000
9/12/2012	5:56:28 PM	BCl3 MFC set to  0.000000
9/12/2012	5:56:28 PM	PH3 MFC set to  0.000000
9/12/2012	5:56:28 PM	SiCl4 MFC set to  0.000000
9/12/2012	5:56:28 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	5:56:28 PM	Tube furnace set to 0
9/12/2012	6:01:59 PM	Run finished at 6:01 PM
9/12/2012	6:08:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/12/2012	6:08:49 PM	Recipe started at 6:08 PM
9/12/2012	6:08:49 PM	Helium valve closed
9/12/2012	6:08:49 PM	H2 valve closed
9/12/2012	6:08:49 PM	BCl3 valve closed
9/12/2012	6:08:49 PM	PH3 valve closed
9/12/2012	6:08:49 PM	SiCl4 pre valve closed
9/12/2012	6:08:49 PM	SiCl4 post valve closed
9/12/2012	6:08:49 PM	Main Vac valve closed
9/12/2012	6:08:49 PM	Bypass valve closed
9/12/2012	6:08:49 PM	Bubbler valve closed
9/12/2012	6:08:49 PM	Helium MFC set to  0.000000
9/12/2012	6:08:49 PM	H2 MFC set to  0.000000
9/12/2012	6:08:49 PM	BCl3 MFC set to  0.000000
9/12/2012	6:08:49 PM	PH3 MFC set to  0.000000
9/12/2012	6:08:49 PM	SiCl4 MFC set to  0.000000
9/12/2012	6:08:49 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	6:08:49 PM	Tube furnace set to 0
9/12/2012	6:08:52 PM	H2 valve closed
9/12/2012	6:08:52 PM	BCl3 valve closed
9/12/2012	6:08:52 PM	PH3 valve closed
9/12/2012	6:08:52 PM	SiCl4 pre valve closed
9/12/2012	6:08:52 PM	SiCl4 post valve closed
9/12/2012	6:08:52 PM	Main Vac valve closed
9/12/2012	6:08:52 PM	Bypass valve closed
9/12/2012	6:08:52 PM	Bubbler valve closed
9/12/2012	6:08:52 PM	Helium valve opened
9/12/2012	6:08:52 PM	Helium MFC set to  500.000000
9/12/2012	6:08:52 PM	H2 MFC set to  0.000000
9/12/2012	6:08:52 PM	BCl3 MFC set to  0.000000
9/12/2012	6:08:52 PM	PH3 MFC set to  0.000000
9/12/2012	6:08:52 PM	SiCl4 MFC set to  0.000000
9/12/2012	6:08:52 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	6:08:52 PM	Tube furnace set to 0
9/12/2012	6:10:02 PM	Helium valve closed
9/12/2012	6:10:02 PM	H2 valve closed
9/12/2012	6:10:02 PM	BCl3 valve closed
9/12/2012	6:10:02 PM	PH3 valve closed
9/12/2012	6:10:02 PM	SiCl4 pre valve closed
9/12/2012	6:10:02 PM	SiCl4 post valve closed
9/12/2012	6:10:02 PM	Main Vac valve closed
9/12/2012	6:10:02 PM	Bypass valve closed
9/12/2012	6:10:02 PM	Bubbler valve closed
9/12/2012	6:10:02 PM	Helium MFC set to  0.000000
9/12/2012	6:10:02 PM	H2 MFC set to  0.000000
9/12/2012	6:10:02 PM	BCl3 MFC set to  0.000000
9/12/2012	6:10:02 PM	PH3 MFC set to  0.000000
9/12/2012	6:10:02 PM	SiCl4 MFC set to  0.000000
9/12/2012	6:10:02 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	6:10:02 PM	Tube furnace set to 0
9/12/2012	6:10:03 PM	Run finished at 6:10 PM
9/12/2012	6:10:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/12/2012	6:18:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/12/2012	6:18:41 PM	Recipe started at 6:18 PM
9/12/2012	6:18:41 PM	Helium valve closed
9/12/2012	6:18:41 PM	H2 valve closed
9/12/2012	6:18:41 PM	BCl3 valve closed
9/12/2012	6:18:41 PM	PH3 valve closed
9/12/2012	6:18:41 PM	SiCl4 pre valve closed
9/12/2012	6:18:41 PM	SiCl4 post valve closed
9/12/2012	6:18:41 PM	Main Vac valve closed
9/12/2012	6:18:41 PM	Bubbler valve closed
9/12/2012	6:18:41 PM	Bypass valve opened
9/12/2012	6:18:41 PM	Helium MFC set to  0.000000
9/12/2012	6:18:41 PM	H2 MFC set to  0.000000
9/12/2012	6:18:41 PM	BCl3 MFC set to  0.000000
9/12/2012	6:18:41 PM	PH3 MFC set to  0.000000
9/12/2012	6:18:41 PM	SiCl4 MFC set to  0.000000
9/12/2012	6:18:41 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	6:18:41 PM	Tube furnace set to 0
9/12/2012	6:20:01 PM	Helium valve closed
9/12/2012	6:20:01 PM	H2 valve closed
9/12/2012	6:20:01 PM	BCl3 valve closed
9/12/2012	6:20:01 PM	PH3 valve closed
9/12/2012	6:20:01 PM	SiCl4 pre valve closed
9/12/2012	6:20:01 PM	SiCl4 post valve closed
9/12/2012	6:20:01 PM	Main Vac valve closed
9/12/2012	6:20:01 PM	Bubbler valve closed
9/12/2012	6:20:01 PM	Bypass valve opened
9/12/2012	6:20:01 PM	Helium MFC set to  0.000000
9/12/2012	6:20:01 PM	H2 MFC set to  0.000000
9/12/2012	6:20:01 PM	BCl3 MFC set to  0.000000
9/12/2012	6:20:01 PM	PH3 MFC set to  0.000000
9/12/2012	6:20:01 PM	SiCl4 MFC set to  0.000000
9/12/2012	6:20:01 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	6:20:01 PM	Tube furnace set to 0
9/12/2012	6:21:01 PM	Helium valve closed
9/12/2012	6:21:01 PM	H2 valve closed
9/12/2012	6:21:01 PM	BCl3 valve closed
9/12/2012	6:21:01 PM	PH3 valve closed
9/12/2012	6:21:01 PM	SiCl4 pre valve closed
9/12/2012	6:21:01 PM	SiCl4 post valve closed
9/12/2012	6:21:01 PM	Bypass valve closed
9/12/2012	6:21:01 PM	Bubbler valve closed
9/12/2012	6:21:01 PM	Main Vac valve opened
9/12/2012	6:21:01 PM	Helium MFC set to  0.000000
9/12/2012	6:21:01 PM	H2 MFC set to  0.000000
9/12/2012	6:21:01 PM	BCl3 MFC set to  0.000000
9/12/2012	6:21:01 PM	PH3 MFC set to  0.000000
9/12/2012	6:21:01 PM	SiCl4 MFC set to  0.000000
9/12/2012	6:21:01 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	6:21:01 PM	Tube furnace set to 0
9/12/2012	6:21:02 PM	Run finished at 6:21 PM
9/12/2012	6:21:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/12/2012	6:21:37 PM	Recipe started at 6:21 PM
9/12/2012	6:21:37 PM	Helium valve closed
9/12/2012	6:21:37 PM	H2 valve closed
9/12/2012	6:21:37 PM	BCl3 valve closed
9/12/2012	6:21:37 PM	PH3 valve closed
9/12/2012	6:21:37 PM	SiCl4 pre valve closed
9/12/2012	6:21:37 PM	SiCl4 post valve closed
9/12/2012	6:21:37 PM	Bypass valve closed
9/12/2012	6:21:37 PM	Bubbler valve closed
9/12/2012	6:21:37 PM	Main Vac valve opened
9/12/2012	6:21:37 PM	Helium MFC set to  0.000000
9/12/2012	6:21:37 PM	H2 MFC set to  0.000000
9/12/2012	6:21:37 PM	BCl3 MFC set to  0.000000
9/12/2012	6:21:37 PM	PH3 MFC set to  0.000000
9/12/2012	6:21:37 PM	SiCl4 MFC set to  0.000000
9/12/2012	6:21:37 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	6:21:38 PM	Tube furnace set to 0
9/12/2012	9:21:38 PM	Helium valve closed
9/12/2012	9:21:38 PM	H2 valve closed
9/12/2012	9:21:38 PM	BCl3 valve closed
9/12/2012	9:21:38 PM	PH3 valve closed
9/12/2012	9:21:38 PM	SiCl4 pre valve closed
9/12/2012	9:21:38 PM	SiCl4 post valve closed
9/12/2012	9:21:38 PM	Main Vac valve closed
9/12/2012	9:21:38 PM	Bypass valve closed
9/12/2012	9:21:38 PM	Bubbler valve closed
9/12/2012	9:21:38 PM	Helium MFC set to  0.000000
9/12/2012	9:21:38 PM	H2 MFC set to  0.000000
9/12/2012	9:21:38 PM	BCl3 MFC set to  0.000000
9/12/2012	9:21:38 PM	PH3 MFC set to  0.000000
9/12/2012	9:21:38 PM	SiCl4 MFC set to  0.000000
9/12/2012	9:21:38 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	9:21:38 PM	Tube furnace set to 0
9/12/2012	9:21:41 PM	Helium valve closed
9/12/2012	9:21:41 PM	BCl3 valve closed
9/12/2012	9:21:41 PM	PH3 valve closed
9/12/2012	9:21:41 PM	SiCl4 pre valve closed
9/12/2012	9:21:41 PM	SiCl4 post valve closed
9/12/2012	9:21:41 PM	Main Vac valve closed
9/12/2012	9:21:41 PM	Bypass valve closed
9/12/2012	9:21:41 PM	Bubbler valve closed
9/12/2012	9:21:41 PM	H2 valve opened
9/12/2012	9:21:41 PM	Helium MFC set to  0.000000
9/12/2012	9:21:41 PM	H2 MFC set to  500.000000
9/12/2012	9:21:41 PM	BCl3 MFC set to  0.000000
9/12/2012	9:21:41 PM	PH3 MFC set to  0.000000
9/12/2012	9:21:41 PM	SiCl4 MFC set to  0.000000
9/12/2012	9:21:41 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	9:21:41 PM	Tube furnace set to 0
9/12/2012	9:22:56 PM	Helium valve closed
9/12/2012	9:22:56 PM	BCl3 valve closed
9/12/2012	9:22:56 PM	PH3 valve closed
9/12/2012	9:22:56 PM	SiCl4 pre valve closed
9/12/2012	9:22:56 PM	SiCl4 post valve closed
9/12/2012	9:22:56 PM	Main Vac valve closed
9/12/2012	9:22:56 PM	Bypass valve closed
9/12/2012	9:22:56 PM	H2 valve opened
9/12/2012	9:22:56 PM	Bubbler valve opened
9/12/2012	9:22:56 PM	Helium MFC set to  0.000000
9/12/2012	9:22:56 PM	H2 MFC set to  500.000000
9/12/2012	9:22:56 PM	BCl3 MFC set to  0.000000
9/12/2012	9:22:56 PM	PH3 MFC set to  0.000000
9/12/2012	9:22:56 PM	SiCl4 MFC set to  0.000000
9/12/2012	9:22:56 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	9:22:56 PM	Tube furnace set to 0
9/12/2012	9:22:57 PM	Helium valve closed
9/12/2012	9:22:57 PM	BCl3 valve closed
9/12/2012	9:22:57 PM	PH3 valve closed
9/12/2012	9:22:57 PM	SiCl4 pre valve closed
9/12/2012	9:22:57 PM	SiCl4 post valve closed
9/12/2012	9:22:57 PM	Main Vac valve closed
9/12/2012	9:22:57 PM	Bypass valve closed
9/12/2012	9:22:57 PM	H2 valve opened
9/12/2012	9:22:57 PM	Bubbler valve opened
9/12/2012	9:22:57 PM	Helium MFC set to  0.000000
9/12/2012	9:22:57 PM	H2 MFC set to  500.000000
9/12/2012	9:22:57 PM	BCl3 MFC set to  0.000000
9/12/2012	9:22:57 PM	PH3 MFC set to  0.000000
9/12/2012	9:22:57 PM	SiCl4 MFC set to  0.000000
9/12/2012	9:22:57 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	9:22:57 PM	Tube furnace set to 1000
9/12/2012	9:47:57 PM	Helium valve closed
9/12/2012	9:47:57 PM	PH3 valve closed
9/12/2012	9:47:57 PM	Main Vac valve closed
9/12/2012	9:47:57 PM	Bypass valve closed
9/12/2012	9:47:57 PM	H2 valve opened
9/12/2012	9:47:57 PM	BCl3 valve opened
9/12/2012	9:47:57 PM	SiCl4 pre valve opened
9/12/2012	9:47:57 PM	SiCl4 post valve opened
9/12/2012	9:47:57 PM	Bubbler valve opened
9/12/2012	9:47:57 PM	Helium MFC set to  0.000000
9/12/2012	9:47:57 PM	H2 MFC set to  430.000000
9/12/2012	9:47:57 PM	BCl3 MFC set to  20.000000
9/12/2012	9:47:57 PM	PH3 MFC set to  0.000000
9/12/2012	9:47:57 PM	SiCl4 MFC set to  50.000000
9/12/2012	9:47:57 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	9:47:58 PM	Tube furnace set to 1000
9/12/2012	9:54:58 PM	Helium valve closed
9/12/2012	9:54:58 PM	PH3 valve closed
9/12/2012	9:54:58 PM	Main Vac valve closed
9/12/2012	9:54:58 PM	Bypass valve closed
9/12/2012	9:54:58 PM	H2 valve opened
9/12/2012	9:54:58 PM	BCl3 valve opened
9/12/2012	9:54:58 PM	SiCl4 pre valve opened
9/12/2012	9:54:58 PM	SiCl4 post valve opened
9/12/2012	9:54:58 PM	Bubbler valve opened
9/12/2012	9:54:58 PM	Helium MFC set to  0.000000
9/12/2012	9:54:58 PM	H2 MFC set to  450.000000
9/12/2012	9:54:58 PM	BCl3 MFC set to  1.000000
9/12/2012	9:54:58 PM	PH3 MFC set to  0.000000
9/12/2012	9:54:58 PM	SiCl4 MFC set to  50.000000
9/12/2012	9:54:58 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	9:54:58 PM	Tube furnace set to 1000
9/12/2012	10:01:58 PM	Helium valve closed
9/12/2012	10:01:58 PM	BCl3 valve closed
9/12/2012	10:01:58 PM	Main Vac valve closed
9/12/2012	10:01:58 PM	Bypass valve closed
9/12/2012	10:01:58 PM	H2 valve opened
9/12/2012	10:01:58 PM	PH3 valve opened
9/12/2012	10:01:58 PM	SiCl4 pre valve opened
9/12/2012	10:01:58 PM	SiCl4 post valve opened
9/12/2012	10:01:58 PM	Bubbler valve opened
9/12/2012	10:01:58 PM	Helium MFC set to  0.000000
9/12/2012	10:01:58 PM	H2 MFC set to  450.000000
9/12/2012	10:01:58 PM	BCl3 MFC set to  0.000000
9/12/2012	10:01:58 PM	PH3 MFC set to  1.500000
9/12/2012	10:01:58 PM	SiCl4 MFC set to  50.000000
9/12/2012	10:01:58 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	10:01:58 PM	Tube furnace set to 1000
9/12/2012	10:14:58 PM	Helium valve closed
9/12/2012	10:14:58 PM	BCl3 valve closed
9/12/2012	10:14:58 PM	Main Vac valve closed
9/12/2012	10:14:58 PM	Bypass valve closed
9/12/2012	10:14:58 PM	H2 valve opened
9/12/2012	10:14:58 PM	PH3 valve opened
9/12/2012	10:14:58 PM	SiCl4 pre valve opened
9/12/2012	10:14:58 PM	SiCl4 post valve opened
9/12/2012	10:14:58 PM	Bubbler valve opened
9/12/2012	10:14:58 PM	Helium MFC set to  0.000000
9/12/2012	10:14:58 PM	H2 MFC set to  430.000000
9/12/2012	10:14:58 PM	BCl3 MFC set to  0.000000
9/12/2012	10:14:58 PM	PH3 MFC set to  20.000000
9/12/2012	10:14:58 PM	SiCl4 MFC set to  50.000000
9/12/2012	10:14:58 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	10:14:58 PM	Tube furnace set to 1000
9/12/2012	10:15:58 PM	Helium valve closed
9/12/2012	10:15:58 PM	BCl3 valve closed
9/12/2012	10:15:58 PM	PH3 valve closed
9/12/2012	10:15:58 PM	SiCl4 pre valve closed
9/12/2012	10:15:58 PM	SiCl4 post valve closed
9/12/2012	10:15:58 PM	Main Vac valve closed
9/12/2012	10:15:58 PM	Bypass valve closed
9/12/2012	10:15:58 PM	H2 valve opened
9/12/2012	10:15:58 PM	Bubbler valve opened
9/12/2012	10:15:58 PM	Helium MFC set to  0.000000
9/12/2012	10:15:58 PM	H2 MFC set to  500.000000
9/12/2012	10:15:58 PM	BCl3 MFC set to  0.000000
9/12/2012	10:15:58 PM	PH3 MFC set to  0.000000
9/12/2012	10:15:58 PM	SiCl4 MFC set to  0.000000
9/12/2012	10:15:58 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	10:15:58 PM	Tube furnace set to 750
9/12/2012	10:30:58 PM	H2 valve closed
9/12/2012	10:30:58 PM	BCl3 valve closed
9/12/2012	10:30:58 PM	PH3 valve closed
9/12/2012	10:30:58 PM	SiCl4 pre valve closed
9/12/2012	10:30:58 PM	SiCl4 post valve closed
9/12/2012	10:30:58 PM	Main Vac valve closed
9/12/2012	10:30:58 PM	Bypass valve closed
9/12/2012	10:30:58 PM	Helium valve opened
9/12/2012	10:30:58 PM	Bubbler valve opened
9/12/2012	10:30:58 PM	Helium MFC set to  500.000000
9/12/2012	10:30:58 PM	H2 MFC set to  0.000000
9/12/2012	10:30:58 PM	BCl3 MFC set to  0.000000
9/12/2012	10:30:59 PM	PH3 MFC set to  0.000000
9/12/2012	10:30:59 PM	SiCl4 MFC set to  0.000000
9/12/2012	10:30:59 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	10:30:59 PM	Tube furnace set to 0
9/12/2012	10:50:59 PM	Helium valve closed
9/12/2012	10:50:59 PM	H2 valve closed
9/12/2012	10:50:59 PM	BCl3 valve closed
9/12/2012	10:50:59 PM	PH3 valve closed
9/12/2012	10:50:59 PM	SiCl4 pre valve closed
9/12/2012	10:50:59 PM	SiCl4 post valve closed
9/12/2012	10:50:59 PM	Main Vac valve closed
9/12/2012	10:50:59 PM	Bypass valve closed
9/12/2012	10:50:59 PM	Bubbler valve closed
9/12/2012	10:50:59 PM	Helium MFC set to  0.000000
9/12/2012	10:50:59 PM	H2 MFC set to  0.000000
9/12/2012	10:50:59 PM	BCl3 MFC set to  0.000000
9/12/2012	10:50:59 PM	PH3 MFC set to  0.000000
9/12/2012	10:50:59 PM	SiCl4 MFC set to  0.000000
9/12/2012	10:50:59 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	10:50:59 PM	Tube furnace set to 0
9/12/2012	11:10:59 PM	Helium valve closed
9/12/2012	11:10:59 PM	H2 valve closed
9/12/2012	11:10:59 PM	BCl3 valve closed
9/12/2012	11:10:59 PM	PH3 valve closed
9/12/2012	11:10:59 PM	SiCl4 pre valve closed
9/12/2012	11:10:59 PM	SiCl4 post valve closed
9/12/2012	11:10:59 PM	Main Vac valve closed
9/12/2012	11:10:59 PM	Bubbler valve closed
9/12/2012	11:10:59 PM	Bypass valve opened
9/12/2012	11:10:59 PM	Helium MFC set to  0.000000
9/12/2012	11:10:59 PM	H2 MFC set to  0.000000
9/12/2012	11:10:59 PM	BCl3 MFC set to  0.000000
9/12/2012	11:10:59 PM	PH3 MFC set to  0.000000
9/12/2012	11:10:59 PM	SiCl4 MFC set to  0.000000
9/12/2012	11:10:59 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	11:10:59 PM	Tube furnace set to 0
9/12/2012	11:11:56 PM	Helium valve closed
9/12/2012	11:11:56 PM	H2 valve closed
9/12/2012	11:11:56 PM	BCl3 valve closed
9/12/2012	11:11:56 PM	PH3 valve closed
9/12/2012	11:11:56 PM	SiCl4 pre valve closed
9/12/2012	11:11:56 PM	SiCl4 post valve closed
9/12/2012	11:11:56 PM	Main Vac valve closed
9/12/2012	11:11:56 PM	Bubbler valve closed
9/12/2012	11:11:56 PM	Bypass valve opened
9/12/2012	11:11:56 PM	Helium MFC set to  0.000000
9/12/2012	11:11:56 PM	H2 MFC set to  0.000000
9/12/2012	11:11:56 PM	BCl3 MFC set to  0.000000
9/12/2012	11:11:56 PM	PH3 MFC set to  0.000000
9/12/2012	11:11:56 PM	SiCl4 MFC set to  0.000000
9/12/2012	11:11:56 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	11:11:56 PM	Tube furnace set to 0
9/12/2012	11:12:56 PM	Helium valve closed
9/12/2012	11:12:56 PM	H2 valve closed
9/12/2012	11:12:56 PM	BCl3 valve closed
9/12/2012	11:12:56 PM	PH3 valve closed
9/12/2012	11:12:56 PM	SiCl4 pre valve closed
9/12/2012	11:12:56 PM	SiCl4 post valve closed
9/12/2012	11:12:56 PM	Bypass valve closed
9/12/2012	11:12:56 PM	Bubbler valve closed
9/12/2012	11:12:56 PM	Main Vac valve opened
9/12/2012	11:12:56 PM	Helium MFC set to  0.000000
9/12/2012	11:12:56 PM	H2 MFC set to  0.000000
9/12/2012	11:12:56 PM	BCl3 MFC set to  0.000000
9/12/2012	11:12:56 PM	PH3 MFC set to  0.000000
9/12/2012	11:12:56 PM	SiCl4 MFC set to  0.000000
9/12/2012	11:12:56 PM	Bypass solenoid MFC set to  0.000000
9/12/2012	11:12:56 PM	Tube furnace set to 0
